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Photo-induced deposition of low dielectric constant polyimide film for interlayer dielectric applications

Zhang, JY; Boyd, IW; (1997) Photo-induced deposition of low dielectric constant polyimide film for interlayer dielectric applications. ELECTRONICS LETTERS , 33 (10) pp. 911-912. 10.1049/el:19970603.

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Type: Article
Title: Photo-induced deposition of low dielectric constant polyimide film for interlayer dielectric applications
DOI: 10.1049/el:19970603
Keywords: Science & Technology, Technology, Engineering, Electrical & Electronic, Engineering, dielectric thin films, semiconductor devices, EXCIMER
UCL classification: UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology
URI: http://discovery.ucl.ac.uk/id/eprint/1384173
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