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Growth of tantalum pentoxide film by pulsed laser deposition

Zhang, JY; Fang, Q; Boyd, IW; (1999) Growth of tantalum pentoxide film by pulsed laser deposition. APPLIED SURFACE SCIENCE , 138 pp. 320-324. 10.1016/S0169-4332(98)00413-9.

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Type: Article
Title: Growth of tantalum pentoxide film by pulsed laser deposition
Location: STRASBOURG, FRANCE
DOI: 10.1016/S0169-4332(98)00413-9
Keywords: Science & Technology, Physical Sciences, Technology, Chemistry, Physical, Materials Science, Coatings & Films, Physics, Applied, Physics, Condensed Matter, Chemistry, Materials Science, Physics, tantalum pentoxide film, growth, pulsed laser deposition, CHEMICAL-VAPOR-DEPOSITION, OXIDE-FILMS, THIN-FILMS, TA2O5 FILMS, SILICON
UCL classification: UCL > School of BEAMS
UCL > School of BEAMS > Faculty of Maths and Physical Sciences
UCL > School of BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology
URI: http://discovery.ucl.ac.uk/id/eprint/1384159
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