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Measurement of phosphorus segregation in silicon at the atomic scale using scanning tunneling microscopy

Oberbeck, L; Curson, NJ; Hallam, T; Simmons, MY; Bilger, G; Clark, RG; (2004) Measurement of phosphorus segregation in silicon at the atomic scale using scanning tunneling microscopy. Applied Physics Letters , 85 (8) pp. 1359-1361. 10.1063/1.1784881.

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Type: Article
Title: Measurement of phosphorus segregation in silicon at the atomic scale using scanning tunneling microscopy
DOI: 10.1063/1.1784881
UCL classification: UCL > School of BEAMS
UCL > School of BEAMS > Faculty of Maths and Physical Sciences
UCL > School of BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology
URI: http://discovery.ucl.ac.uk/id/eprint/1361049
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