Double-layer granular SnO2 sensors.
Sensors and Actuators: B. Chemical
Double-layer SnO2 films made up of quasi-spherical grains have been prepared using a thermal evaporation and oxidation technique. The tin is evaporated on a hot substrate, producing a film of metallic drops. The films are oxidized under low partial oxygen pressure in order to obtain SnO2 grains with smooth surfaces. This granular film is electrically non-connected; the interconnection between grains is obtained by the deposition (using the same process) of a second layer. Samples with different particle sizes in the first and second layers can be produced by varying the amount of tin deposited per unit area. Alcohol and hydrogen sensitivity measurements have been performed on samples with different microstructures in order to investigate the relationship between the microstructure and the functional properties and to optimize the grain sizes of the two layers. © 1995.
|Title:||Double-layer granular SnO2 sensors|
|Keywords:||Gas sensors, Tin oxide sensors|
|UCL classification:||UCL > School of BEAMS > Faculty of Engineering Science
UCL > School of BEAMS > Faculty of Engineering Science > Computer Science
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