Lupina, G and Lukosius, M and Wenger, C and Dudek, P and Kozlowski, G and Müssig, H-J and Abrutis, A and Galvelis, R and Katkus, T and Saltyte, Z and Kubilius, V (2009) Deposition of BaHfO3 dielectric layers for microelectronic applications by pulsed Liquid Injection MOCVD. Chemical Vapor Deposition , 15 (7-9) 167 - 170.
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| Type: | Article |
|---|---|
| Title: | Deposition of BaHfO3 dielectric layers for microelectronic applications by pulsed Liquid Injection MOCVD |
| UCL classification: | UCL > School of BEAMS > Faculty of Maths and Physical Sciences > Chemistry |
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