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Indium oxides by reactive ion beam assisted evaporation: From material study to device application

Wang, K; Vygranenko, Y; Chaji, R; Nathan, A; (2009) Indium oxides by reactive ion beam assisted evaporation: From material study to device application. J VAC SCI TECHNOL B , 27 (2) 612 - 617. 10.1116/1.3093887.

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Abstract

Indium oxides were deposited by reactive ion beam assisted e-beam evaporation at room temperature. A material study was conducted through a variety of material characterization including crystal structure, electrical properties, optical properties, and chemical composition, along with an investigation of material properties as a function of primary deposition parameters such as ion flux and deposition rate. Implementing the developed semiconducting indium oxide as a channel material, the authors further demonstrated high-performance indium oxide thin-film transistors (TFTs) with conventional silicon dioxide gate dielectric derived by plasma-enhanced chemical vapor deposition (PECVD). The n-channel TFT has a threshold voltage of similar to 2.0 V, a field-effect mobility of 33 cm(2)/V s at a gate bias of 20 V, an ON/OFF current ratio of 10(8), and a subthreshold slope of 2.0 V/decade. The stability study displays a small threshold voltage shift of similar to 0.6 V under a 60 h constant current stress condition. The TFT reported here has one of the best performance characteristics in terms of field-effect mobility, ON/OFF current ratio, OFF current and device stability, using conventional and large-area foundry-compatible PECVD gate dielectrics. The device performance coupled with PECVD dielectrics makes ion beam assisted e-beam evaporation derived indium oxide TFT a promising candidate for active matrix flat-panel displays. 2009 American Vacuum Society. [DOI: 10.1116/1.3093887]

Type:Article
Title:Indium oxides by reactive ion beam assisted evaporation: From material study to device application
DOI:10.1116/1.3093887
Keywords:THIN-FILM TRANSISTORS, ROOM-TEMPERATURE, CHANNEL LAYER, ZNO, SEMICONDUCTOR
UCL classification:UCL > School of BEAMS > Faculty of Engineering Science > Electronic and Electrical Engineering

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