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Features of Silicon Oxidation

STONEHAM, A; (1991) Features of Silicon Oxidation. (AEA Technology Reports InTec 0684 ). United Kingdom Atomic Energy Authority (UKAEA): Harwell, UK.

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Type:Report
Title:Features of Silicon Oxidation
UCL classification:UCL > School of BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology

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