STONEHAM, A (1991) Features of Silicon Oxidation. (AEA Technology Reports InTec 0684 ). United Kingdom Atomic Energy Authority (UKAEA): Harwell, UK.
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| Type: | Report |
|---|---|
| Title: | Features of Silicon Oxidation |
| UCL classification: | UCL > School of BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology |
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