UCL logo

UCL Discovery

UCL home » Library Services » Electronic resources » UCL Discovery

Why model high-k dielectrics?

Stoneham, AM; (2002) Why model high-k dielectrics? Journal of Non-Crystalline Solids , 303 (1) 114 - 122. 10.1016/S0022-3093(02)00966-3. Green open access

[img]
Preview
PDF
129090.pdf

Download (96kB)

Abstract

New dielectrics need more than a high dielectric constant. They need to satisfy various constraints concerning band offsets, limits on charge traps, processability, reproducibility, and stability against degradation and breakdown. It seems unlikely that purely empirical approaches will produce a dielectric which justifies major investment. I discuss some of the atomistic modelling which can aid selection, and which might indicate routes around some of the interface-related and defect-related problems. These include diffusion during processing or in operation, the use of interface engineering to adjust band offsets, and the issues of crystallinity and of stoichiometry. (C) 2002 Elsevier Science Ltd. All rights reserved.

Type: Article
Title: Why model high-k dielectrics?
Open access status: An open access version is available from UCL Discovery
DOI: 10.1016/S0022-3093(02)00966-3
Publisher version: http://dx.doi.org/10.1016/S0022-3093(02)00966-3
Language: English
Additional information: Text made available to UCL Discovery by kind permission of Elsevier B.V., 2012. The content of this volume of the Journal of Non-Crystalline Solids contains a large fraction of the papers presented at the symposium ‘High-k Gate Dielectrics’ organized for the European Materials Research Society Meeting held in Strasbourg, France, from 5 to 8 June 2001.
Keywords: SELF-TRAPPED EXCITON, SILICON OXIDATION, FORCE MICROSCOPY, BAND OFFSETS, DIFFUSION, HYDROGEN, OXIDES, AL2O3, EQUILIBRIA, DEUTERIUM
UCL classification: UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology
URI: http://discovery.ucl.ac.uk/id/eprint/129090
Downloads since deposit
182Downloads
Download activity - last month
Download activity - last 12 months
Downloads by country - last 12 months

Archive Staff Only

View Item View Item