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Treatment of semiconductor surfaces by laser-induced electronic excitation

Itoh, N; Stoneham, AM; (2001) Treatment of semiconductor surfaces by laser-induced electronic excitation. J PHYS-CONDENS MAT , 13 (26) R489 - R503. 10.1088/0953-8984/13/26/201. Green open access

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Abstract

We review how semiconductor surfaces can be modified by laser irradiation. We deal solely with phenomena induced by electronic excitation, and compare the processes induced by laser irradiation with those induced by electrons from scanning tunnelling microscope tips. The ejection of host atoms from perfect surface sites, or of hydrogen from hydrogen-terminated surfaces, takes place either by single excitation for high-energy photons or with multiple excitation for low-energy photons, even though the quantum yield for ejection by single excitation is extremely low. The atoms neighbouring defects on surfaces are ejected with higher probabilities than those on perfect sites. There appear to be anti-bonding states, embedded in the continuum, such that excitation to them can induce atomic ejection. When the photon energy is too small, multiple photoexcitation or dense excitation is needed to reach these anti-bonding states. Possible applications of laser surface treatments are discussed.

Type: Article
Title: Treatment of semiconductor surfaces by laser-induced electronic excitation
Open access status: An open access version is available from UCL Discovery
DOI: 10.1088/0953-8984/13/26/201
Publisher version: http://dx.doi.org/10.1088/0953-8984/13/26/201
Language: English
Additional information: Text made available to UCL Discovery by kind permission of IOP Publishing, 2012
Keywords: SCANNING-TUNNELING-MICROSCOPY, PHOTOCHEMICAL HYDROGEN DESORPTION, SI(111) SURFACES, BOND BREAKING, STIMULATED DESORPTION, STRUCTURAL-CHANGES, PARTICLE-EMISSION, SI(100) SURFACE, ATOM EXTRACTION, SI SURFACES
UCL classification: UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology
URI: http://discovery.ucl.ac.uk/id/eprint/129086
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