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FABRICATION OF 1ST-ORDER GRATINGS FOR 1.5 MU-M DFB LASERS BY HIGH-VOLTAGE ELECTRON-BEAM LITHOGRAPHY

FICE, MJ; AHMED, H; CLEMENTS, S; (1987) FABRICATION OF 1ST-ORDER GRATINGS FOR 1.5 MU-M DFB LASERS BY HIGH-VOLTAGE ELECTRON-BEAM LITHOGRAPHY. ELECTRON LETT , 23 (11) 590 - 592.

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Type: Article
Title: FABRICATION OF 1ST-ORDER GRATINGS FOR 1.5 MU-M DFB LASERS BY HIGH-VOLTAGE ELECTRON-BEAM LITHOGRAPHY
UCL classification: UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Electronic and Electrical Eng
URI: http://discovery.ucl.ac.uk/id/eprint/118463
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