SYNTHESIS OF SILICON OXYNITRIDE FROM A POLYMERIC PRECURSOR .1. HYDROLYSIS OF DICHLOROMETHYLSILANE.
J MATER SCI
Previous studies suggest that silicon oxynitride can be synthesized by pyrolysing polymers which are produced by the copolymerization of cyclic polysiloxanes and cyclic polysilazanes. The cyclic polysiloxanes required are [CH3Si(H)O]m with m = 4, 5 and 6, and these can be produced by the hydrolysis of dichloromethylsilane. In the present work, a significantly improved combined yield of these cyclic polysiloxanes is reported. Three main reasons are attributed to this achievement an improved hydrolysis procedure; optimization of the initial acidity of the reaction medium; and changes in the total reaction time. Thus a mixture containing > 95 mol% cyclic tetramer, pentamer and hexamer has been prepared and this represents a approximately 20 mol% improvement over previously reported results. Investigations of the preparation and characterization of the cyclic polysilazanes, copolymers and silicon oxynitride will be described in Parts II-IV, respectively.
|Title:||SYNTHESIS OF SILICON OXYNITRIDE FROM A POLYMERIC PRECURSOR .1. HYDROLYSIS OF DICHLOROMETHYLSILANE|
|UCL classification:||UCL > School of BEAMS > Faculty of Engineering Science
UCL > School of BEAMS > Faculty of Engineering Science > Mechanical Engineering
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