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SYNTHESIS OF SILICON OXYNITRIDE FROM A POLYMERIC PRECURSOR .1. HYDROLYSIS OF DICHLOROMETHYLSILANE

YU, GE; PARRICK, J; EDIRISINGHE, M; FINCH, D; RALPH, B; (1993) SYNTHESIS OF SILICON OXYNITRIDE FROM A POLYMERIC PRECURSOR .1. HYDROLYSIS OF DICHLOROMETHYLSILANE. JOURNAL OF MATERIALS SCIENCE , 28 (15) pp. 4250-4254. 10.1007/BF00351262.

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Type: Article
Title: SYNTHESIS OF SILICON OXYNITRIDE FROM A POLYMERIC PRECURSOR .1. HYDROLYSIS OF DICHLOROMETHYLSILANE
DOI: 10.1007/BF00351262
Keywords: Science & Technology, Technology, Materials Science, Multidisciplinary, Materials Science, MATERIALS SCIENCE, MULTIDISCIPLINARY
UCL classification: UCL > School of BEAMS
UCL > School of BEAMS > Faculty of Engineering Science
URI: http://discovery.ucl.ac.uk/id/eprint/105973
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