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SYNTHESIS OF SILICON OXYNITRIDE FROM A POLYMERIC PRECURSOR .1. HYDROLYSIS OF DICHLOROMETHYLSILANE

YU, GE; PARRICK, J; EDIRISINGHE, M; FINCH, D; RALPH, B; (1993) SYNTHESIS OF SILICON OXYNITRIDE FROM A POLYMERIC PRECURSOR .1. HYDROLYSIS OF DICHLOROMETHYLSILANE. J MATER SCI , 28 (15) 4250 - 4254.

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Abstract

Previous studies suggest that silicon oxynitride can be synthesized by pyrolysing polymers which are produced by the copolymerization of cyclic polysiloxanes and cyclic polysilazanes. The cyclic polysiloxanes required are [CH3Si(H)O]m with m = 4, 5 and 6, and these can be produced by the hydrolysis of dichloromethylsilane. In the present work, a significantly improved combined yield of these cyclic polysiloxanes is reported. Three main reasons are attributed to this achievement an improved hydrolysis procedure; optimization of the initial acidity of the reaction medium; and changes in the total reaction time. Thus a mixture containing > 95 mol% cyclic tetramer, pentamer and hexamer has been prepared and this represents a approximately 20 mol% improvement over previously reported results. Investigations of the preparation and characterization of the cyclic polysilazanes, copolymers and silicon oxynitride will be described in Parts II-IV, respectively.

Type:Article
Title:SYNTHESIS OF SILICON OXYNITRIDE FROM A POLYMERIC PRECURSOR .1. HYDROLYSIS OF DICHLOROMETHYLSILANE
UCL classification:UCL > School of BEAMS > Faculty of Engineering Science > Mechanical Engineering

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