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SYNTHESIS OF SILICON OXYNITRIDE FROM A POLYMERIC PRECURSOR .4. PYROLYSIS OF THE COPOLYMERS

YU, GE; EDIRISINGHE, M; FINCH, D; RALPH, B; PARRICK, J; (1995) SYNTHESIS OF SILICON OXYNITRIDE FROM A POLYMERIC PRECURSOR .4. PYROLYSIS OF THE COPOLYMERS. JOURNAL OF MATERIALS SCIENCE , 30 (21) pp. 5371-5380. 10.1007/BF00351546.

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Type: Article
Title: SYNTHESIS OF SILICON OXYNITRIDE FROM A POLYMERIC PRECURSOR .4. PYROLYSIS OF THE COPOLYMERS
DOI: 10.1007/BF00351546
Keywords: Science & Technology, Technology, Materials Science, Multidisciplinary, Materials Science, MATERIALS SCIENCE, MULTIDISCIPLINARY
UCL classification: UCL > School of BEAMS
UCL > School of BEAMS > Faculty of Engineering Science
URI: http://discovery.ucl.ac.uk/id/eprint/105969
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