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Design and fabrication of zeolite-based microreactors and membrane microseparators

Wan, YSS; Chau, JLH; Gavriilidis, A; Yeung, KL; (2001) Design and fabrication of zeolite-based microreactors and membrane microseparators. MICROPOR MESOPOR MAT , 42 (2-3) 157 - 175.

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Abstract

This paper demonstrates that zeolites (i.e., Sil-1, ZSM-5 and TS-1) can be employed as catalysts, membrane or structural materials in miniature chemical devices. Traditional semiconductor fabrication technology was employed in micromachining the device architecture. The fabricated miniature zeolite-based structures find applications as catalytic microreactors and membrane microseparators. Four strategies for the manufacture of zeolite catalytic microreactors were discussed: zeolite powder coating, uniform zeolite film growth, localized zeolite growth, and etching of zeolite-silicon composite film. These zeolites were deposited either as film or discrete islands with controlled particle size, crystal morphology, layer thickness (3-16 mum) and film orientation (e.g., highly oriented (101) and (200) films). Crystal intergrowth was also manipulated through the use of growth inhibitors. Silicalite-l was also prepared as free-standing membrane for zeolite membrane microseparators. (C) 2001 Elsevier Science B.V. All rights reserved.

Type: Article
Title: Design and fabrication of zeolite-based microreactors and membrane microseparators
Keywords: zeolite, microreactor, microseparator, MEMS, membrane, PARTIAL OXIDATION REACTIONS, TITANIUM SILICALITE-1, FUTURE OPPORTUNITIES, SEPARATION, REACTORS, FILMS, CATALYSIS, MICROFABRICATION, MICROSTRUCTURE, HYDROCARBONS
UCL classification: UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Chemical Engineering
URI: http://discovery.ucl.ac.uk/id/eprint/10458
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