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OXIDATION OF SILICON

MOTT, NF and RIGO, S and ROCHET, F and STONEHAM, AM (1989) OXIDATION OF SILICON. PHILOS MAG B , 60 (2) 189 - 212.

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Type:Article
Title:OXIDATION OF SILICON
UCL classification:UCL > School of BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology

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