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Resolving 500 nm axial separation by multi-slice X-ray ptychography

Huang, X; Yan, H; He, Y; Ge, M; Öztürk, H; Fang, YLL; Ha, S; ... Chu, YS; + view all (2019) Resolving 500 nm axial separation by multi-slice X-ray ptychography. Acta Crystallographica Section A: Foundations and Advances , A75 pp. 336-341. 10.1107/S2053273318017229. Green open access

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Abstract

Multi-slice X-ray ptychography offers an approach to achieve images with a nanometre-scale resolution from samples with thicknesses larger than the depth of field of the imaging system by modeling a thick sample as a set of thin slices and accounting for the wavefront propagation effects within the specimen. Here, we present an experimental demonstration that resolves two layers of nanostructures separated by 500 nm along the axial direction, with sub-10 nm and sub-20 nm resolutions on two layers, respectively. Fluorescence maps are simultaneously measured in the multi-modality imaging scheme to assist in decoupling the mixture of low-spatial-frequency features across different slices. The enhanced axial sectioning capability using correlative signals obtained from multi-modality measurements demonstrates the great potential of the multi-slice ptychography method for investigating specimens with extended dimensions in 3D with high resolution.

Type: Article
Title: Resolving 500 nm axial separation by multi-slice X-ray ptychography
Open access status: An open access version is available from UCL Discovery
DOI: 10.1107/S2053273318017229
Publisher version: https://doi.org/10.1107/S2053273318017229
Language: English
Additional information: This version is the version of record. For information on re-use, please refer to the publisher’s terms and conditions.
Keywords: X-ray ptychography; multi-slice approach; nanostructures
UCL classification: UCL
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology
URI: https://discovery.ucl.ac.uk/id/eprint/10069577
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