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Local anodic oxidation lithography on organic semiconductor crystals: Oxide depth revealed by conductance tomography

Kamaludin, MS; Thompson, RJ; Hudziak, S; Mitrofanov, O; Curson, NJ; (2018) Local anodic oxidation lithography on organic semiconductor crystals: Oxide depth revealed by conductance tomography. Organic Electronics , 63 pp. 231-236. 10.1016/j.orgel.2018.09.041.

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Abstract

Nanopatterning electrically insulating oxide lines on organic electronic surfaces can play a role in fabricating future nanoscale devices. Here we write oxide features on rubrene single crystal surfaces by performing local anodic oxidation using the tip of an atomic force microscope. Oxide feature height increases with voltage bias and decreases with tip writing speed, and gaps as small as 22 nm at the surface between two parallel oxide lines were realised. Conductance tomography is employed in a unique way to determine the depths of oxide features, by exposing subsurface layers of the patterned material without using chemical etching while simultaneously mapping material conductance. The oxide line depth exceeds its height, with the depth-to-height ratio frequently being more than 1.6. A critical electric field of ∼3 × 10⁶ V/cm is identified, below which the oxide growth ceases, resulting in a maximum oxide vertical extent of about ∼60 nm at a voltage bias of ∼20 V.

Type: Article
Title: Local anodic oxidation lithography on organic semiconductor crystals: Oxide depth revealed by conductance tomography
DOI: 10.1016/j.orgel.2018.09.041
Publisher version: https://doi.org/10.1016/j.orgel.2018.09.041
Language: English
Additional information: This version is the author accepted manuscript. For information on re-use, please refer to the publisher’s terms and conditions.
Keywords: Organic electronic devices, Single crystal rubrene, Nanoscale device fabrication, Local anodic oxidation, Scanning probe lithography, Conductance tomography
UCL classification: UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Electronic and Electrical Eng
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology
URI: http://discovery.ucl.ac.uk/id/eprint/10057340
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