UCL logo

UCL Discovery

UCL home » Library Services » Electronic resources » UCL Discovery

Silicon wafer defect detection using high frequency guided waves

Lauper, M; Fromme, P; Robyr, JL; Masserey, B; (2018) Silicon wafer defect detection using high frequency guided waves. In: Proceedings of SPIE - Volume 10600, Health Monitoring of Structural and Biological Systems XII; (2018). SPIE: Colorado, United States. Green open access

[img]
Preview
Text
106000G.pdf - ["content_typename_Published version" not defined]

Download (604kB) | Preview

Abstract

In the photovoltaic industry monocrystalline silicon wafers are employed for the manufacture of solar panels with high conversion efficiency. The cutting process induces micro-cracks on the thin wafer surface. High frequency guided ultrasonic waves are considered for the structural monitoring of the wafers and the nondestructive characterization of the micro-cracks. The material anisotropy of the monocrystalline silicon leads to variations of the wave characteristics depending on the propagation direction relative to the crystal orientation. In non-principal directions of the crystal, wave beam skewing occurs. Selective excitation of the fundamental Lamb wave modes was achieved using a custom-made angle beam transducer and holder to achieve a controlled contact pressure. The out-of-plane component of the guided wave propagation was measured using a noncontact laser interferometer. Artificial defects were introduced in the wafers using a micro indenter with varying loads. The defects were characterized from microscopy images to measure the indent size and combined crack length. The scattering of the A0Lamb wave mode was measured experimentally and the characteristics of the scattered wave field were correlated to the defect size. The detection sensitivity is discussed.

Type: Proceedings paper
Title: Silicon wafer defect detection using high frequency guided waves
Event: Health Monitoring of Structural and Biological Systems XII; (2018)
ISBN-13: 9781510616967
Open access status: An open access version is available from UCL Discovery
DOI: 10.1117/12.2294523
Publisher version: https://doi.org/10.1117/12.2294523
Language: English
Additional information: This version is the version of record. For information on re-use, please refer to the publisher’s terms and conditions.
Keywords: Monitoring, Silicon, Lamb Wave Modes, Scattering
UCL classification: UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Mechanical Engineering
URI: http://discovery.ucl.ac.uk/id/eprint/10054009
Downloads since deposit
49Downloads
Download activity - last month
Download activity - last 12 months
Downloads by country - last 12 months

Archive Staff Only

View Item View Item