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Guided ultrasonic wave beam skew in silicon wafers

Pizzolato, M; Masserey, B; Robyr, JL; Fromme, P; (2018) Guided ultrasonic wave beam skew in silicon wafers. In: AIP Conference Proceedings. (pp. 090005). American Institute of Physics (AIP) Green open access

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Abstract

In the photovoltaic industry, monocrystalline silicon wafers are employed for solar cells with high conversion efficiency. Micro-cracks induced by the cutting process in the thin wafers can lead to brittle wafer fracture. Guided ultrasonic waves would offer an efficient methodology for the in-process non-destructive testing of wafers to assess micro-crack density. The material anisotropy of the monocrystalline silicon leads to variations of the guided wave characteristics, depending on the propagation direction relative to the crystal orientation. Selective guided ultrasonic wave excitation was achieved using a contact piezoelectric transducer with custom-made wedges for the A 0 and S 0 Lamb wave modes and a transducer holder to achieve controlled contact pressure and orientation. The out-of-plane component of the guided wave propagation was measured using a non-contact laser interferometer. The phase slowness (velocity) of the two fundamental Lamb wave modes was measured experimentally for varying propagation directions relative to the crystal orientation and found to match theoretical predictions. Significant wave beam skew was observed experimentally, especially for the S 0 mode, and investigated from 3D finite element simulations. Good agreement was found with the theoretical predictions based on nominal material properties of the silicon wafer. The important contribution of guided wave beam skewing effects for the non-destructive testing of silicon wafers was demonstrated.

Type: Proceedings paper
Title: Guided ultrasonic wave beam skew in silicon wafers
Event: 44th Annual Review of Progress in Quantitative Nondestructive Evaluation,
ISBN-13: 9780735416444
Open access status: An open access version is available from UCL Discovery
DOI: 10.1063/1.5031568
Publisher version: https://doi.org/10.1063/1.5031568
Language: English
Additional information: © 2018 Author(s). This version is the version of record. For information on re-use, please refer to the publisher’s terms and conditions.
UCL classification: UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Mechanical Engineering
URI: http://discovery.ucl.ac.uk/id/eprint/10048747
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