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DEVELOPMENT OF A NOVEL LARGE AREA EXCIMER LAMP FOR DIRECT PHOTO DEPOSITION OF THIN-FILMS

BERGONZO, P; PATEL, P; BOYD, IW; KOGELSCHATZ, U; (1992) DEVELOPMENT OF A NOVEL LARGE AREA EXCIMER LAMP FOR DIRECT PHOTO DEPOSITION OF THIN-FILMS. In: BOYD, IW, (ed.) (Proceedings) SYMP ON LASER SURFACE PROCESSING AND CHARACTERIZATION, AT THE 1991 SPRING MEETING OF THE EUROPEAN MATERIALS RESEARCH SOC / INTERNATIONAL CONF ON ADVANCED MATERIALS. (pp. pp. 424-429). ELSEVIER SCIENCE PUBL B V

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Type: Proceedings paper
Title: DEVELOPMENT OF A NOVEL LARGE AREA EXCIMER LAMP FOR DIRECT PHOTO DEPOSITION OF THIN-FILMS
Event: SYMP ON LASER SURFACE PROCESSING AND CHARACTERIZATION, AT THE 1991 SPRING MEETING OF THE EUROPEAN MATERIALS RESEARCH SOC / INTERNATIONAL CONF ON ADVANCED MATERIALS
Location: STRASBOURG, FRANCE
Dates: 28 May 1991 - 31 May 1991
ISBN: 0-444-89419-5
Keywords: Science & Technology, Technology, Physical Sciences, Materials Science, Multidisciplinary, Physics, Condensed Matter, Materials Science, Physics
UCL classification: UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
URI: http://discovery.ucl.ac.uk/id/eprint/10032520
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